| 摘要 |
PURPOSE: A plant for feeding helium is provided to easily apply the helium to a variety of production lines and to always obtain the necessary amount of helium gas to each production line. CONSTITUTION: The plant(1) for feeding helium to plural production lines(5a, 5b, 5c) installs:a helium feeding source(2) having at least 7,000 liters of inner capacitance; a network(4) of plural second ducts(4a, 4b, 4c) connected to more than one production line(5a, 5b, 5c) which use the helium gas; main ducts(3, 3a, 3b) for transferring helium connected to the upper class of the helium feeding source(2) and the lower class of the network(4) of the second ducts(4a, 4b, 4c) continued to the production lines(5a, 5b, 5c). |
