| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier bard by which electrodes of an IC device can be electrically connected surely to electrodes of an IC tester by a method wherein the IC device is brought into pressure contact with a contact part by using a carrier-urging means. SOLUTION: Many carriers 20 which are placed on a carrier board 5 are made to float by respective springs 33, for floating, with a weak spring force. The carriers 20 are position-adjusted independently, smoothly and surely so as to follow a contact block 6 at a test head 3a. As a result, spherical electrodes 15 of all IC devices 10 can be brought into contact with probing pins 7 of the contact block 6. In addition, when the respective carriers 20 are position- adjusted, the floating operation of the carriers 20 is released by continuing the raising operation of the carrier board 5 even after they are position-adjusted. The relative position of the carriers 20 to the contact block 6 is not changed, compression springs 4 are bent by a prescribed amount, all the spherical electrodes 15 are electrically connected surely to the probing pins 7, and there is no fear that a contact defect or the like is generated.
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