| 摘要 |
PROBLEM TO BE SOLVED: To avoid a proximity sense phenomenon to accurately conduct measurement, and to confirm accurately in noncontact the position of a measured object without using other sensing means. SOLUTION: This touch signal probe 10 is provided with a stylus 3 having a contact part 3B supported to a stylus holder 2, a vibrating means 4A for making the stylus 3 resonate, a detecting means 4B for detecting change in the vibration, and a Q-value controlling means 7 for controlling the Q-value in the resonance of the stylus 3. The controlling means 7 conducts switching between a high Q-value mode for keeping high the Q-value of the resonance in the stylus 3 to detect a state affected to the vibration of the stylus 3 by reflection, from a measured object, of a vibration wave emitted from the contact part 3B in accompaniment to the vibration of the stylus 3, and a low Q-value mode for reducing the Q-value of the resonance to the extent that the influence on the vibration of the stylus 3 by the reflection of the vibration wave emitted from the contact part 3B from the measured object, is negligible.
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