CONTROL METHOD OF HIGH FREQUENCY POWER FOR PLASMA GENERATION AND PLASMA GENERATION APPARATUS

摘要

PURPOSE: The apparatus can control the plasma density easily and appropriately for long time. CONSTITUTION: A plasma density information extraction part(11) of long life and thermal filamentless type is installed apart from a high frequency power supplying part for plasma generation. The plasma density information extraction part supplies the high frequency power for measurement to the plasma by intervening a dielectric tube, and acquires the plasma density information by measuring the physical constant relating with the reflection and the absorption of the high frequency power. The apparatus controls the plasma generation high frequency power outputted from a high frequency power source(8) by changing an impedance matching unit(10) according to the comparison result between the measured plasma density and the set plasma density and by adjusting the impedance matching state between the power source and the plasma.