| 摘要 |
PROBLEM TO BE SOLVED: To protect a power generating film against defects. SOLUTION: First and second transparent electrode films 21, 22 are deposited on a glass substrate 1 followed by deposition of an amorphous silicon power generating film 3 and a metal electrode film 4. Upper surface of the first transparent electrode film 21 is corrugated in order to enhance power generation efficiency by bending the optical path of incident solar light. The second transparent electrode film 22 is formed only in the recesses of the corrugated surface in order to eliminate a steep recess. This structure prevents a defect from being generated in the amorphous silicon power generating film 3 due to a recess. |
