| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave device for reducing characteristics degradation even at the time of forming a conductor pattern on a substrate provided with a pyroelectric property. SOLUTION: An interdigital transducer 2, the metal thin film 3a of the first layer of a bonding pad 3, a reflector 4 and a dicing line 15 to be turned to the same potential are formed on the substrate 11 provided with an aluminum thin film 12. A conductive resist film for which conductive particles are made to coexist in nonconductive resist is formed, an aluminum film is formed on the conductive resist film by vapor deposition and the metal thin film 3b of a second layer is formed. Since the conductive resist film is used, even for the one not connected to the dicing line 15, even when an electric charge is generated by the pyroelectric property of the substrate in a temperature elevating/lowering process, the potential is canceled by the movement of the electric charge, the generation of fusion and polarization inversion is suppressed and excellent characteristics are obtained.
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