| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator which can raise the pressure of a vacuum container easily and safety to atmospheric pressure. SOLUTION: In the case of putting a vacuum container 3 which oscillates a laser beam by exciting laser gas in atmospheric pressure for maintenance, the vacuum container 3 is supplied inside with gas by a gas supply means 9. When a pressure switch 19 provided inside the vacuum container 3 issues a signal to show that the pressure has reached the atmospheric pressure, a solenoid valve 5 is closed to immediately stop the supply of gas. |
