OBSERVING METHOD USING FOCUSED ION BEAM AND DEVICE THEREOF

摘要

PURPOSE: A method for preventing the damage on the surface of a sample is provided when irradiating with the ion beam to obtain the SIM image. CONSTITUTION: The method for obtaining the observed image by a scanning ion microscope(SMI) is composed of the steps of: generating the vacuum circumstance by exhausting the air inside of a sampling chamber to outside; driving a thermostat(14) to heat a reservoir(13); evaporating water by separating the contained water from the hydrate salt in the reservoir(13); injecting the evaporated vapor to the surface of a sample through a gas outlet(8) when a valve(17) is opened.