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发明名称
POSITION DETECTION OF MECHANICAL RESONANT SCANNER MIRROR
摘要
申请公布号
EP0928437(A4)
申请公布日期
2000.02.23
申请号
EP19970943368
申请日期
1997.09.18
申请人
UNIVERSITY OF WASHINGTON
发明人
MELVILLE, CHARLES, D.
分类号
G01P15/09;G02B7/182;G02B26/10;G02B27/01;(IPC1-7):G02B26/08
主分类号
G01P15/09
代理机构
代理人
主权项
地址
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