BLUE AND ULTRAVIOLET PHOTOLITHOGRAPHY WITH ORGANIC LIGHT EMITTING DEVICES

摘要

A system and method of photolithography. The system of the present invention includes the use of an Organic Light Emitting Device ("OLED") as a light source for photolithography. A programmable matrix of OLEDs may be used to generate blue or ultraviolet light for patterning a layer of photosensitive material. The programmable OLED matrix may be either actively or passively driven.