High temperature sensor

摘要

A sensor has a heating and/or temperature determining conductor line which is covered with a gas-tight passivating layer for preventing sensor functioning being affected by mechanical stresses in the conductor line. A sensor has a structured planar metal conductor line (2) for heating and/or for temperature determination, the conductor line being covered with the gas-tight passivating layer (3) described above, at least on the side facing away from the substrate (1). Preferred Features: The passivating layer has the same thermal expansion coefficient as the substrate and is 0.5-2 mu m thick.