发明名称 Isolated sidewall capacitor
摘要 A capacitor structure is provided, with a first conductor on top of a substrate, a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein, a non-conductive sidewall spacer formed in the first opening, the non-conductive sidewall spacer having a second opening formed therein, and a second conductor formed in the second opening.
申请公布号 US6027966(A) 申请公布日期 2000.02.22
申请号 US19970910179 申请日期 1997.08.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SAENGER, KATHERINE LYNN;COMFORT, JAMES H.;GRILL, ALFRED;KOTECKI, DAVID EDWARD
分类号 H01L21/02;H01L21/8242;(IPC1-7):H01L21/70 主分类号 H01L21/02
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