PRODUCTION OF THIN FILM SINGLE CRYSTAL AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To grow a thin film single crystal having good quality by enabling heating of only a colored substrate, improving reaction efficiency and also enabling uniform heating, in the production. SOLUTION: This device is provided with: a reaction tube 1 to which an introducing pipe 2 for introducing a gaseous raw material and a discharge pipe 3 for discharging a waste gas are connected; a colored substrate 5 placed inside the reaction tube 1; a colored substrate holder 4 for fixing the colored substrate 5; an infrared heating source 6 placed outside the reaction tube 1; and a reflecting mirror 7 placed on the periphery of the heating source 6; wherein the colored substrate 5 is heated by condensing infrared rays with the reflecting mirror 7.