发明名称 |
High pulse rate pulse power system with resonant power supply |
摘要 |
A high pulse rate pulse power source for supplying controlled high energy electrical pulses at rates of 2000 Hz or greater. The source includes a pulse generating circuit including a charging capacitor, a solid state switch and a current limiting inductor. Pulses generated in the pulse generating circuit are compressed in at least two pulse compression circuits and a step-up pulse transformer increases peak voltage to at least 12,000 volts. A very fast regulated resonant power supply is provided for charging the charging capacitor in less than 400 microseconds and a pulse control system including a programmed processor controls the charging of the charging capacitor to an accuracy of less than about one percent at a rate of at least 2000 charges per second.
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申请公布号 |
US6028872(A) |
申请公布日期 |
2000.02.22 |
申请号 |
US19980211825 |
申请日期 |
1998.12.15 |
申请人 |
CYMER, INC. |
发明人 |
PARTLO, WILLIAM N.;BIRX, DANIEL L.;NESS, RICHARD M.;ROTHWEIL, DANIEL A.;MELCHER, PAUL C.;SMITH, BRETT D. |
分类号 |
G03F7/20;H01S3/02;H01S3/03;H01S3/036;H01S3/097;H01S3/0971;H01S3/225;H02M9/02;H03K3/57;H03K17/80;(IPC1-7):H01S3/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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