发明名称 WORK PIECE INSTALLING STRUCTURE OF WIRE SAW
摘要 PROBLEM TO BE SOLVED: To provide a work piece installing structure of a wire saw which can suppress the warp of a cut work piece. SOLUTION: While a slice base 46 is formed of a low heat conductive material, and a material with the linear expansion coefficient almost same as an ingot 32, the thickness of the slice base 46 is made in the thickness to absorb the heat expansion difference of a work plate 42 to the ingot 32, and the expansion of the ingot 32 side is made within the allowable scope. As a result, it can be prevented that the heat expansion of the work plate 42 and the slice base 46 gives an influence to the ingot 32.
申请公布号 JP2000052225(A) 申请公布日期 2000.02.22
申请号 JP19990131866 申请日期 1999.05.12
申请人 TOKYO SEIMITSU CO LTD 发明人 YAMAMOTO SEIJI
分类号 B24B27/06;B28D5/04;B28D7/04;H01L21/304;(IPC1-7):B24B27/06 主分类号 B24B27/06
代理机构 代理人
主权项
地址