| 摘要 |
PROBLEM TO BE SOLVED: To efficiently seal a vacuum state and corrosive fluid by integrally forming an O-ring core material of an elliptical- or a diamond-cross section extracted supercritically with a coating material in manufacturing a composite- structure O-ring having the coating layer provided on a rubber core material surface. SOLUTION: When a composite-structure O-ring is manufactured, a supercritically extracted material is used as a rubber core material and the cross section of the rubber core material is set to an elliptical or a diamond shape. The elliptical or the diamond shape includes a shape gradually forming the circular part of the elliptical shape linearly into the diamond shape. The thickness of the coating layer is thus set to uneven and partially changed so as to balance the corrosion resistance with compression permanent deformation. This constitution permits this O-ring to be used in a highly vacuum state and effectively used for a sealing material for a vacuum device and a semiconductor manufacturing equipment being in contact with corrosive fluid.
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