FILM STRUCTURE EXCELLENT IN HEAT AND WEAR RESISTANCE

摘要

PROBLEM TO BE SOLVED: To suppress the generation of iron oxide on a nitride film formed by cathode arc type ion plating in a hot environment and to obtain a film structure having enhanced heat and wear resistances. SOLUTION: A TiAlN film is formed in 2-7μm thickness on a nitride film formed by cathode arc type ion plating. An oxide film of 2-20μm thickness comprising MgO, Al2O3 or ZrO2 is formed on a nitride film formed by cathode arc type ion plating and a TiAlN film is further formed in 2-7μm thickness on the oxide film. An oxide film of 2-20μm thickness comprising MgO, Al2O3 or ZrO2 is formed on a nitride film formed by cathode arc type ion plating, a TiAlN film is further formed in 2-5μm thickness on the oxide film and a silicate film is further formed on the TiAlN film by a sol-gel process.