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发明名称
EVAPORANT MATERIAL CONTROL FOR VAPOR DEPOSITION APPARATUS
摘要
申请公布号
US3488214(A)
申请公布日期
1970.01.06
申请号
USD3488214
申请日期
1967.03.15
申请人
SPERRY RAND CORP.
发明人
RAYMOND G. LINS
分类号
C23C14/24;(IPC1-7):C23C13/02;C23C11/02
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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