| 摘要 |
PROBLEM TO BE SOLVED: To provide a device excellent in corrosion resistance and having a long life by providing conductors such as a heating resistor and a circuit on a ceramic body, and specifying the chlorine stuck quantity on a lead wire and a brazing metal filler in the device brazed with an electrode section and the lead wire for exciting the conductors. SOLUTION: The surface stuck quantity of a chlorine element on a lead wire and a brazing metal filler 10 is set to 2000 counts or below in an EPMA analysis value. Ni plating is applied 2-6μm thick on a metalized part 8 formed on the outer periphery of a ceramic heater obtained in the prescribed process, then a lead wire 7 made of Ni wire is brazed with Au-Cu, Ag-Cu wax. Ni plating 11 is applied on the brazed metal filler 10 again, and it is heat-treated in the reducing atmosphere at the temperature of 600-1000 deg.C to obtain the ceramic heater with the lead wire 7. Chlorine is left on the surface in the plating process, however the remaining chlorine is removed in the final heat treatment process in the reducing atmosphere.
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