| 摘要 |
PROBLEM TO BE SOLVED: To prevent outgas constituents from being generated without losing performance and dimension accuracy that component originally have by coating the components for generating the outgas consisting of rubber and a magnet or scattering a magnetic powder with poly-p-xylylene or is derivative. SOLUTION: Poly-p-xylylene is obtained by the gaseous phase vapor deposition polymerization method and is made of each or the combination of a monomer-hexamer of 5,000 degree-of-polymerization of poly-p-xylylene, polymonochloro-p-xylylene, and polydichloro-p-xylylene. Vapor deposition processes consist of a first process where a solid 2 hexamer di-p-xylylene is sublimated at 100-200 deg.C with a degree-of-vacuum of 0.001-1 Torr, a second process where diradical-p-xylylene is polymerized due to thermal decomposition at 450-700 deg.C, a third process where a macromolecular amount of poly-p-xylylene is coated and formed at a room temperature. The obtained by poly-p-xylylene covering can be subjected to conformal coating to a cladding body. Also, since this process can be made at a room temperature, no thermal history can be given to the cladding body.
|
