| 摘要 |
PROBLEM TO BE SOLVED: To make small and uniform contact resistances of contact points in a probe which comes in touch with many lead terminals of an IC or the like simultaneously thereby electrically connecting the terminals. SOLUTION: A slit 9b inclined in a pressuring direction (up -down direction) is cut to a measuring element 5 of a leaf spring, whereby an elastic part 9 having an inclined arm part 9e is formed. When a contact part 10 comes in touch with a lead terminal T of a work W such as an IC or the like, the arm part 9e is elastically deformed by a pressuring force. However, since the arm part 9e is inclined in a direction (a) of the pressuring, the contact part 10 slides on a surface of the terminal T in a breadthwise or thicknesswise direction of the measuring element 5. In consequence of this, an oxide film on the surface of the terminal T is removed, whereby a contact resistance is reduced and contact resistances at the contact parts 10 of the entire measuring element 5 are uniformed. An accuracy of measurement results of the device connected to the probe is improved.
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