OPTICAL WAVEGUIDE PROBE, ITS MANUFACTURE, AND SCANNING NEAR-FIELD ATOMIC FORCE MICROSCOPE USING SAME OPTICAL WAVEGUIDE PROBE

摘要

PROBLEM TO BE SOLVED: To provide superior volume productivity, to obtain a uniform shape at low cost, and to set a high resonance frequency and a low spring constant. SOLUTION: An optical waveguide probe 100 has a structure in which a probe base 2 is laminated and formed on a probe holding plate 1 formed of resin. A probe 3 is in a hook shape protruding along the surface of the lamination, and an optical waveguide 4 is formed from the probe base 2 along the edge part of the probe 3. An opening part 5 is formed at the tip of the optical waveguide 4. The opposite-side end part is a light incident part 6. The optical waveguide 4 has a structure in which a core 42 to transmit light is laminated and patterned on base cladding 41 and in which upper cladding 43 is formed so as to cover the core 42.