| 摘要 |
PROBLEM TO BE SOLVED: To suppress increase of chip area by controlling even a semiconductor CMOS integrated circuit having a DC path previously by means of a test circuit for IDDQ thereby performing IDDQ test without interrupting the DC path. SOLUTION: Net stationary current consumption of a DUT(device under test) 102 and a current containing a leakage current in failure or insufficient breakdown voltage are determined by adding the all input currents of a first high accuracy current measuring unit 101 for measuring the stationary power supply current and converting it to a voltage and second high accuracy current measuring units 103a1-103aN for measuring each input current of the DUT 102 and converting it to a voltage and then subtracting the total input current with a subtractor 105 from the stationary power supply current containing the through current of a DC path. A comparison/decision circuit 106 compares the stationary power supply current of the DUT 102 thus operated with a preset decision reference level thus making a decision whether the DUT 102 is acceptable or not.
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