| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of defects when a sample is divided into two parts by partially dividing the sample into two parts by means of a layer for division by leaving a prescribed area of the layer for division as an undivided area, and then, completely dividing the sample by applying a force to the undivided area from a prescribed direction. SOLUTION: Substrate holding sections 120 and 150 provided to a dividing device 100 hold a laminated substrate 101 from both sides. A controller 190 leaves the central part of the porous layer 101b of the laminated substrate 101 as an undivided area by jetting a jet forming medium, such as the water, etc., upon the porous layer 101b from a nozzle 102 by feeding the medium to the nozzle 102 by controlling a pump 114 while rotating the substrate 101 by controlling a motor 110, and then, completely divides the substrate 101 into substrates 101a and 101c by applying a force to the undivided area by jetting the medium upon the area from a prescribed direction while the rotation of the substrate 101 is stopped.
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