摘要 |
PROBLEM TO BE SOLVED: To prevent a semiconductor junction part from being damaged and output characteristics from decreasing, when baking an electrode material from an area on a reflection prevention film for forming. SOLUTION: In a method for manufacturing a solar battery element, where a region 1a for exposing one conductivity type at one main surface side of a semiconductor substrate 1 for exposing the other conductivity type and at the same time an antireflection film 2 is formed, and electrode materials 4 and 5 are baked to the other main surface side of the semiconductor substrate 1 and the antireflection film for forming, a metal material 3 for silicide is included between the reflection prevention film 2 and the electrode material 5 for baking the electrode material 5. |