| 摘要 |
PROBLEM TO BE SOLVED: To provide an air conditioning method for a clean room facility, which is able to constantly keep a clean room which is equipped with an automatic conveying truck in a clean condition. SOLUTION: In an air conditioning control method for a clean room facility wherein a plurality of fan filter units 14 (a, b, c) are arranged on a ceiling 12, wherein clean air is vertically blown down from the individual fan filter units so as to be exhausted from a grating 16, and wherein an automatic conveying truck 26 which travels along a track is provided on the grating floor; a plurality of AGV sensitive photoelectric sensors 28 (a-d) for the automatic conveying truck are arranged along a running region 36 of the automatic conveying truck 26, and the blowing capacity of the fan filter units 14 which are located at the front and rear of the automatic conveying truck is increased based on signals for confirming the position of the automatic conveying truck 26, which are outputted from the AGV sensitive photoelectric sensors.
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