X-RAY INSPECTION METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a more enhanced result in relation to the data of an element to be detected in X-ray detection. SOLUTION: Two kinds of X-ray transmission data obtained by irradiating a sample 3 to be measured with monochromatic X-raysλ1 having a wavelength shorter than that of the absorption end of the element to be detected in the sample 3 to be measured and monochromatic X-raysλ2 of a longer wavelength are defferentiated by utilizing that the absorption coefficient of an element is largely different before and after the absorption end of the element to obtain the X-ray transmission coefficient only of the element to be detected in the sample to be measured.