摘要 |
<p>PROBLEM TO BE SOLVED: To provide a structure of an optical wave guide element solving a characteristics of low driving voltage and of low propagation loss at the same time. SOLUTION: An optical wave guide element is installed with a conductive or a semi-conductive lower electrode 2, an epitaxial or a single-oriented buffer layer 4 set on the lower electrode 2, an epitaxial or a single oriented optical wave guide 1 provided on the buffer layer 4, and a conductive thin film or a semi-conductive thin film upper electrode 7 set on the optical wave guide 1. This optical wave guide element can modulate, switching or deflect light beams being made incident to the optical wave guide by applying a voltage between the upper electrode 7 and the lower electrode 2.</p> |