发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT AND PRODUCTION OF PLATING RESIST USING THESE
摘要 PROBLEM TO BE SOLVED: To obtain a photosensitive resin compsn. excellent in sensitivity and photosetting property and capable of efficiently forming a resist excellent in resolution and resistance to electroless copper plating by photolithography by incorporating a specified polyhydroxy-ether resin compd. and a specified blocked isocyanate compd. SOLUTION: The photosensitive resin compsn. contains 100 pts.wt., in total, of 20-90 pts.wt. polyhydroxy-ether resin compd. obtd. by allowing a polybasic acid anhydride to react with hydroxyl groups of a resin having repeating units of formula I in an equiv. ratio of 0.08-0.8 and 80-10 pts.wt. photopolymerizable unsatd. compd. having terminal ethylenically unsatd. groups, 0.1-20 pts.wt. photopolymn. initiator and 1-30 pts.wt. blocked isocyanate compd. of formula II. In the formula I, R1 is a 1-12C divalent satd. aliphatic hydrocarbon, R2 and R3 are each l-4C alkyl or the like and (x) and (y) are each an integer of 0-4. In the formula II, R4 is an m-valent org. group, (m) is an integer of 1-6 and R5 is the residue of a blocking agent.
申请公布号 JP2000047383(A) 申请公布日期 2000.02.18
申请号 JP19980214418 申请日期 1998.07.29
申请人 HITACHI CHEM CO LTD 发明人 NAKANO AKIO;WATANABE MITSUAKI;TANAKA YOJI;OTA FUMIHIKO
分类号 G03F7/027;G03F7/028;G03F7/032;G03F7/035;H05K3/18 主分类号 G03F7/027
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