| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of forming a micro pattern in a thermally press-adhering stage, also dispensing with a developing stage and performing film transfer/retouch with a small size laser. SOLUTION: In this device, a work 1 is placed on an X-Y table 2 and then, a retouching film 3 is pressed and contacts with the work 1 with a transparent pressure plate 5 and thereafter, the retouching film 3 is irradiated through an objective lens 4, with a laser beam from a laser light source 10 consisting of a continuous wave oscillation laser of the infrared region or a high-frequency pulse laser of >=500 Hz frequency, to heat the retouching film 3 so as to soften the retouching film 3 and thermally adhere it on the work. Thus, the film retouching can be performed by using a comparatively small size laser in a completely dry process and also, the retouching stage can be simplified. |
