| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrode plate in a plasma treatment apparatus for reducing a gap between a gas blowing hole of an electrode plate and a gas blowing hole of a plasma treatment apparatus, without damaging an inner face of the gas blowing hole when the electrode plate is mounted on the plasma treatment apparatus. SOLUTION: An electrode plate 1 in a plasma treatment apparatus has a plurality of gas blowing hole 2. A small hole 3 is provided at an outer boundary part of the electrode plate 1 for aligning a gas blowing hole 10 of the plasma treatment apparatus and the gas blowing hole 2 in the electrode plate 1. |
