| 摘要 |
<p>PROBLEM TO BE SOLVED: To highly accurately analyze a composition of an extremely fine area in combination with the miniaturization of an analytical area by thinning a sample by suppressing the re-adhesion of carbon and oxygen becoming the trouble of analysis with respect to a thin film sample and enabling highly accurate AES analysis. SOLUTION: A thin film sample 1 is fixed to a sample stand 2 to be introduced into an ultrahigh vacuum apparatus and ion sputtering of about 100Åis performed while the sample stand 2 is rotated. Any kind of the sample stand is used. Next, the sample stand 2 is taken out of the ultrahigh vacuum apparatus and the thin film sample 1 is taken out of the sample stand 1. Next, the thin film sample is reversed in order to etch an opposite surface and fixed to a sample stand 3 having a Farady cup therein. At this time, the hole 4 reaching the surfrace of the sample stand 3 from the Farady cup and an analyzing region 5 are allowed to coincide with each other. Again, the sample stand 3 and the thin film specimen are introduced into the measuring chamber of AES held to a superhigh vacuum state and, while the sample stand 3 is rotated, ion sputtering of about 100Åis performed. Thereafter, AES measurement is performed.</p> |
