发明名称 METHOD AND EQUIPMENT FOR INSPECTING CHARACTER OF IC
摘要 PROBLEM TO BE SOLVED: To pick up the image of a character on the surface of an IC under a substantially stationary stabilized state by moving a camera reversely to the advancing direction of a camera truck and bringing the relative speed between the camera and the IC to zero or nearly zero at the time of picking an image. SOLUTION: A large number of ICs 21 are arranged on tray 20 below a camera truck 1 and a character 22 is formed on the surface of the IC 21. The camera truck 1 is carried in one direction A through a motor 2 and a ball screw 3 and a control signal 12a is delivered to a motor 9 from a controller 12 according to a set program depending on the carrying state of the motor 2. When a camera 6 is carried reversely to one direction A through a rod 7 and a disc 8, relative speed between the camera 6 and the IC 21 is brought to zero or nearly zero and an image pickup trigger signal 12b is inputted to an image processor 13 and a camera operating signal 13a is delivered to the camera 6. The camera 6 is operated when the relative speed is brought to zero or nearly zero and the image of the character 22 on the IC 21 is picked up clearly.
申请公布号 JP2000046533(A) 申请公布日期 2000.02.18
申请号 JP19980211148 申请日期 1998.07.27
申请人 TAMAGAWA SEIKI CO LTD 发明人 IKUMA SHIGERU
分类号 G01B11/24;G01N21/89;G06T1/00;G06T7/00 主分类号 G01B11/24
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