| 摘要 |
PROBLEM TO BE SOLVED: To remove bubbles in liquid to be metered in metering the liquid using an non-movable flow meter in a chemicals preparing apparatus. SOLUTION: A chemicals preparing apparatus 1 providing non-movable flow meters 6, 10, 14 in liquid flow paths 5, 9, 13, in particular average surface roughness on the inner surface of the flow path 13 is set to 0.42μm or less. Thereby, since the occurrence of bubbles in the liquid to be metered is inhibited as much as possible, a reduced coefficient, correct metering can be performed. Since metering each ingredient of chemicals is performed in the flow path and mixing is performed in a reservoir, a metering bath or a preparing bath is not necessary. As a result, item parts count is less than that of a conventional chemicals preparing apparatus, and the apparatus becomes more compact. The initial cost for the apparatus is also reduced.
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