| 摘要 |
PROBLEM TO BE SOLVED: To enhance accuracy of measurement by making a planar measuring table for mounting a thin article to be measured of ceramic thereby suppressing undulation of the measuring table. SOLUTION: The measuring equipment 1 comprises a planar ceramic measuring table 2. Fine ceramic having rigidity high enough not to cause deformation through aging, e.g. ceramic for stretch, is preferably employed. A pair of sliding rails 11 are arranged in back forth direction on the left and right of the measuring table 2. A gate type movable bridge 3 sliding on the sliding rails 11 is fixed with CCD camera 4 reciprocal in the left/right direction in order to pick up the image of an article to be measured vertically from above. Since the ceramic measuring table 2 has smaller undulation as compared with an aluminum or glass measuring table and reduce aging, undulation is not required to be regulated by moving a supporting member up and down.
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