| 摘要 |
<p>A compact torch (10) for use in semiconductor processing which may be used both to produce steam and to perform wet or dry dichlorethylene (DCE) oxidation at varying concentrations with no reconfiguration of the torch, providing full temperature of control of the oxidation product gases, with redundancy to provide automatic backup of heating and ignition elements (16), and with non-mechanical flow control of the oxidation product gases.</p> |
