Gerät zum Bewegen eines Objektes

摘要

The accuracy of an apparatus for the movement of an object is increased by means of compensating for geometric errors and load and temperature induced deformations. The effects of the errors and deformations are stored in regularly updated compensation tables or parameterisations from which the error values as a function of position are available. The appropriate error values are selected while the complete momentary state of the apparatus can be taken into account. The derived error values can be used to correct the measured position in a feedback loop or to modify the steering signals for driving means without use of a feedback loop.