| 发明名称 |
Turbomolecular pump |
| 摘要 |
<p>A turbomolecular pump is provided in which the structure of a stator blade (20) is improved for cooling rotor blades (2), thereby achieving a higher thermal conduction efficiency. The arrangement provides contact surfaces of the stator blades (20) and stator blade spacers (22) to be engaged/crushed upon assembling the pump. <IMAGE> <IMAGE></p> |
| 申请公布号 |
EP0979947(A2) |
申请公布日期 |
2000.02.16 |
| 申请号 |
EP19990306359 |
申请日期 |
1999.08.11 |
| 申请人 |
SEIKO SEIKI KABUSHIKI KAISHA |
发明人 |
YAMAUCHI, AKIRA;NONAKA, MANABU;OKADA, TAKASHI |
| 分类号 |
F04D19/04;F04D29/58;(IPC1-7):F04D19/04 |
主分类号 |
F04D19/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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