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发明名称
Verfahren zum chemischen Polieren von Halbleiterscheiben
摘要
申请公布号
DE1546039(A1)
申请公布日期
1970.02.05
申请号
DE19661546039
申请日期
1966.03.11
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
KLAUS HENNINGS,DIPL.-PHYS.DR.;HANS-JUERGEN SCHUETZE,DIPL.-PHYS.DR.
分类号
C23F1/08;H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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