摘要 |
<p>A semiconducting material substrate for use in integrated circuits manufacturing processes, where said substrate has a discoidal shape with two surfaces, i.e. a bottom surface and a top surface, respectively, and said substrate is also provided with marking indicia to indicate its crystallographic orientation. According to the present invention discoidal surfaces (2, 3; 12, 13) of said substrate (1; 11) have an axial symmetry and marking indicia (4, 5; 14) are executed at least on one of said discoidal surfaces (2, 3; 12, 13). <IMAGE></p> |