发明名称 Semiconducting material substrate for use in integrated circuits manufacturing processes and production method thereof
摘要 <p>A semiconducting material substrate for use in integrated circuits manufacturing processes, where said substrate has a discoidal shape with two surfaces, i.e. a bottom surface and a top surface, respectively, and said substrate is also provided with marking indicia to indicate its crystallographic orientation. According to the present invention discoidal surfaces (2, 3; 12, 13) of said substrate (1; 11) have an axial symmetry and marking indicia (4, 5; 14) are executed at least on one of said discoidal surfaces (2, 3; 12, 13). <IMAGE></p>
申请公布号 EP0980098(A1) 申请公布日期 2000.02.16
申请号 EP19980830500 申请日期 1998.08.11
申请人 STMICROELECTRONICS S.R.L. 发明人 PIO, FEDERICO
分类号 B28D5/00;H01L23/544;(IPC1-7):H01L23/544;B44B7/00 主分类号 B28D5/00
代理机构 代理人
主权项
地址