Roller type rotary brush for surface polishing of metals, non-ferrous metal etc. and for cleaning surfaces of semiconductor substrates, glass etc.

摘要

The rotary brush has a rod-shaped core (11) and numerous annular brushes (15), superlaid in axial direction of the core, each annular brush has an annulus and a brush section, radially protruding from the annulus section. The annular brush forms a wave at a plane, orthogonal to its axial direction. The wave has several periods in an angle of 360 deg . The core is a cylindrical body with several wedge grooves (13a) on its surface. The annulus section has on its inner surface at least a pair of wedges which can engage the wedge grooves.