A container of coolant used in a NIKON TM stepper is utilizing a transparent duct mounted on a side of the container of coolant to check a liquid level. The container of coolant can be conventional or other similar container of coolant.
申请公布号
US6021669(A)
申请公布日期
2000.02.08
申请号
US19980073874
申请日期
1998.05.07
申请人
UNITED MICROELECTRONICS CORP.
发明人
CHIU, SHIH-HSUN;LEE, LI-CHUNG;CHIA, WEI-SHENG;CHENG, PATRICK
