| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a thin film from bulging when a mask protective member is attached to a mask member. SOLUTION: After a mask protective member 2 is set on a mask protective member loading jig 1 and when a mask member 3 is moved downward to the vicinity of the mask protective member 2 in this state while the pattern face 31 of the mask member 3 is faced downward, air pressure 4 is added to the thin film 22. However, since the recess 11 is almost sealed with the thin film 22, air pressure 5 resisting against the air pressure 4 is added from the bottom 11b of the recess 11 to the thin film 22. Thereby, when the mask protective member 2 is attached to the mask member 3, the thin film 22 hardly bulges downward.</p> |
