| 摘要 |
PROBLEM TO BE SOLVED: To prevent discharge breakdowns due to pyroelectric charge and also to perform characteristics checking of each surface acoustic wave(SAW) device element in a wafer state by forming a short-circuit pattern, which is for connecting positive and negative electrodes to each other which constitute an IDT electrode of the SAW device element. SOLUTION: In a ladder type SAW filter element, SAW resonators 2 to 6 are arranged on a piezoelectric substrate (wafer) at intervals and are connected through a signal 7 and a ground electrode 8 so as to be a ladder type structure. All electrodes of the filter element are electrically connected by using a thin wire 10 of a conductive thin film. Even if pyroelectric charge is generated on the surface of the wafer due to pyroelectric charge effect, the pyroelectric charge moves instantaneously through the wire 10. Also, in a state in which each electrode of filter elements is electrically connected through the wire 10, the characteristic of the filter element is measured by using a measurement probe.
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