| 摘要 |
PROBLEM TO BE SOLVED: To improve the working efficiency of correction by composing a primary standard by a plate that is provided with the dimension scale in an X direction, the dimension scale in a Y direction that orthogonally crosses the X direction, and a plurality of recessed parts with a different depth in a Z direction that orthogonally crosses the X and Y directions. SOLUTION: A primary standard for calibrating a lead frame inspection machine is a plate, and dimensions scales 13 and 14 are provided in Y (vertical) and X (horizontal) directions, respectively, and orthogonally cross each other. Then, recessed parts 1-12 form a line and have different depths. When the recessed parts 1-12 are inspected by the lead frame inspection machine, the lead frame inspection machine is adjusted so that the inspection machine indicates the correct depth of the recessed parts 1-12, thus performing correction for inspecting dimensions in a Z direction. Also, when the scale space of the dimension scale 13 is inspected, the lead frame inspection machine is adjusted, thus performing the correction for inspecting dimensions in the Y direction. Furthermore, when the scale interval of the dimension scale 14 is inspected, the lead frame inspection machine is adjusted, thus performing the correction for inspecting dimensions in the X direction.
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