发明名称 CoPt SPUTTERING TARGET, ITS PRODUCTION AND CoPt-MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a CoPt sputtering target, by which the formation of element distribution in the plane of the medium can be suppressed when it is used in the formation of film, the method for production of the same, and the magnet recording medium. SOLUTION: A CoPt sputtering target containing Co as a main component contains elements selected from Ni and the elements of groups IVa, Va and VIa in addition to Pt, and gives a X-ray diffraction pattern, wherein the diffraction peaks show that the elements in the target are each present as a substantially metallic element single form. The magnetic recording medium having little dispersion of the composition in the plane can be obtained by sputtering the target. The target is produced, e.g. by low-temp. sintering a compact composed of Co-powder, Pt-powder and elemental simple substances selected from Ni and the elements of groups IVa, Va and VIa at 400-1,000 deg.C.
申请公布号 JP2000038660(A) 申请公布日期 2000.02.08
申请号 JP19980204669 申请日期 1998.07.21
申请人 HITACHI METALS LTD 发明人 TAKASHIMA HIROSHI;MURATA HIDEO
分类号 B22F3/00;C22C1/04;C22C19/07;C23C14/34;G11B5/64;G11B5/65;G11B5/66;G11B5/82;H01F41/18;(IPC1-7):C23C14/34 主分类号 B22F3/00
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