| 摘要 |
PROBLEM TO BE SOLVED: To remove an effect of diffraction for an illuminator making a spherical object an illumination object and to enhance resolution and the depth of the focus of the illuminator for the spherical object (hereafter illuminator). SOLUTION: The illuminator consists of a light source part 1, a collimate lens 2, a rotary elliptic mirror 6, a spherical semiconductor 4 respectively making to coincide a center with the second focus F2 of the rotary elliptic mirror 6 to be arranged, a spherical microlens array 3 and a spherical mask 5. In this illuminator, luminous flux outgoing from the light source part 1 is converged on the first focus F1 of the rotary elliptic mirror 6 by the collimate lens 2, and the luminous flux outgoing from the first focus F1 is bent by a reflection surface 60, and collectively exposes nearly the whole surface of the spherical semiconductor 4 arranged on the second focus F2 through the spherical mask 5. For such a illuminator, the spherical microlens array 3 is arranged concentrically between the spherical mask 5 and the spherical semiconductor 4, and a beam divided by diffraction on the spherical mask 5 surface is functioned so as to overlap again on the spherical semiconductor 4.
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