| 摘要 |
PROBLEM TO BE SOLVED: To keep the interface between an oxide film of SiO2 or the like and a metallic film in a clean state by coating the surface of a substrate with the oxide film by deposition, successively depositing the metallic film and a compd. film contg. Ni and P on the oxide film while continuously carrying out the coating and depositing steps. SOLUTION: The surface of a disk substrate comprising an org. material or glass is coated with an oxide film of SiO2, Al2O3, TiO2 or the like by deposition and a metallic film of Cr or the like and an NiP compd. film are successively deposited on the oxide film. At this time, the coating and depositing steps are continuously carried out to keep the interface between the oxide film and the metallic film in a clean state. The metallic film of Cr or the like formed on the oxide film is upgraded, accordingly the NiP compd. film is also upgraded. The magnetic anisotropy of grains in a magnetic film formed on the NiP compd. film is enhanced and the magnetization characteristics of the magnetic film, in particular coercive force is enhanced.
|
