发明名称 Substrate transferring device
摘要 A substrate transferring device including a pair of support arms for supporting LCD substrates substantially horizontally, expandable multi-joint link mechanisms for moving the support arms in a horizontal plane, a first motor for extending and retracting the link mechanisms, a rotary base on which the link mechanisms are mounted, and a second motor for rotating the rotary base, wherein one of the support arms is provided so that an LCD substrate supported by the support arm is, at least partially, overlapped with an LCD substrate supported by the other support arm when the link mechanism is retracted.
申请公布号 US6022185(A) 申请公布日期 2000.02.08
申请号 US19960761520 申请日期 1996.12.09
申请人 TOKYO ELECTRON LIMITED;TOKYO ELECTRON KYUSHU LIMITED 发明人 MOKUO, SHORI
分类号 G02F1/13;H01L21/302;H01L21/3065;H01L21/677;H01L21/68;(IPC1-7):B66C23/00 主分类号 G02F1/13
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