| 摘要 |
PROBLEM TO BE SOLVED: To provide a matching method of a high frequency device, which can precisely execute matching in short time, regardless of the state of a load. SOLUTION: When the signal level of Vz lits outside a prescribed range, a matching variable capacitor 4 is forward rotated or reverse rotated with continuous control of a motor. When the signal level of Vz lies within the prescribed range, the matching variable capacitor 4 is driven pulse-like and is controlled so as to be gradually approach a matching point. At executing of pulse-like driving, a control circuit 15 drives the motor in accordance with a drive pulse waveform which gradually becomes smaller as the absolute value of a voltage level, when the driving pulse of a threshold level range is turned on approaches the matching point. |
